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Proceedings Paper

New method of obtaining a supersmooth surface with angstrom dimension on optical material
Author(s): Xiangyang Liu; Lijiang Wang; Hongyun Luo; Weina Liu; Xiaosheng Wu
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Paper Abstract

This paper combines nonabrasive polishing with cryogenic polishing and proposes a new method to get super-smooth surface with angstrom dimension -- cryogenic polishing without abrasive. We describe its process and give some experiments to show how to keep stabilization in polishing and how to reduce effects of water quality of ice disk on surface roughness. Experiment results show that modifying ice disk before polishing for eliminating vibration and water quality of ice disk have a vital effect on surface roughness. Experiments of polishing K9(Chinese type) glass with ice disk of tape water, pure water and de-ionized water show that workpiece surface roughness polished by ice disk of de-ionized water is the lowest, up to about Ra 0.5 nanometer (nm). This is a new process to gain super-smooth surface with angstrom level on optical material.

Paper Details

Date Published: 6 October 2000
PDF: 5 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402798
Show Author Affiliations
Xiangyang Liu, Jilin Univ. of Technology (China)
Lijiang Wang, Jilin Univ. of Technology (China)
Hongyun Luo, Jilin Institute of Technology (China)
Weina Liu, Jilin Univ. of Technology (China)
Xiaosheng Wu, Jilin Univ. of Technology (China)

Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

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