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Proceedings Paper

Single-scan method for determination of the thickness and optical constant of thin metal film
Author(s): Aihua Zhang; Bo Yuan; Zhuangqi Cao; Qishun Shen; Xiaoming Dou; Yingli Chen; Hideo Tashiro
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Paper Abstract

A novel method with single-wavelength light is developed to determine the optical constants and the thickness of a thin metal film. It bases on a new geometry which consists of a coupling prism, a transparent coating layer directly deposited onto the prism base, a thin metal film (most often gold or silver), and air. The attenuated total reflection technique is employed in our configuration to excite two different kind of surface plasma waves simultaneously. One is the conventional surface plasma wave which propagates along the metal-air interface. The other is a modified long-range surface plasma wave which propagates along the nonsymmetrical structure (coating layer-metal and metal-air interfaces). The reflectivity shows to obvious surface plasmon resonance dips in a single-scan measurement. Every dip can be characterized by three main parameters: the position of the minimum, the peak height at the minimum, and the width of the resonance dip. These parameters provide enough information to determine the thickness, real and imaginary part of the optical constant of the thin metal film. Compared to conventional double- wavelength method and the double-medium technique, the present single-scan method not only avoids of the ambiguity of different conditions caused by two-scan technique, but also the dispersion problem with different light wavelength.

Paper Details

Date Published: 3 October 2000
PDF: 5 pages
Proc. SPIE 4220, Advanced Photonic Sensors: Technology and Applications, (3 October 2000); doi: 10.1117/12.401693
Show Author Affiliations
Aihua Zhang, Shanghai Jiao Tong Univ. (China)
Bo Yuan, Shanghai Jiao Tong Univ. (China)
Zhuangqi Cao, Shanghai Jiao Tong Univ. (China)
Qishun Shen, Shanghai Jiao Tong Univ. (China)
Xiaoming Dou, Shanghai Jiao Tong Univ. (China)
Yingli Chen, Shanghai Jiao Tong Univ. (China)
Hideo Tashiro, RIKEN-The Institute of Physics and Chemical Research (Japan)

Published in SPIE Proceedings Vol. 4220:
Advanced Photonic Sensors: Technology and Applications
Jinfa Tang; Chao-Nan Xu; Haizhang Li, Editor(s)

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