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Proceedings Paper

Reliable curvature sensor for measuring the topography of complex surfaces
Author(s): Michael Schulz; Peter Thomsen-Schmidt; Ingolf Weingaertner
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Paper Abstract

The problem of measuring steep aspheres with high accuracy has not yet been generally solved. In this presentation, a particular sensor type is presented which can be used to measure the form of optically smooth surfaces with no restrictions as regards lateral extent or complexity. It is a curvature sensor which can be guided along the surface. Curvature is an intrinsic property of the artifacts, which is independent of its position and angular orientation.

Paper Details

Date Published: 29 September 2000
PDF: 10 pages
Proc. SPIE 4098, Optical Devices and Diagnostics in Materials Science, (29 September 2000); doi: 10.1117/12.401614
Show Author Affiliations
Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany)
Peter Thomsen-Schmidt, Physikalisch-Technische Bundesanstalt (Germany)
Ingolf Weingaertner, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 4098:
Optical Devices and Diagnostics in Materials Science
David L. Andrews; David L. Andrews; Toshimitsu Asakura; Suganda Jutamulia; Wiley P. Kirk; Max G. Lagally; Ravindra B. Lal; James D. Trolinger, Editor(s)

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