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Proceedings Paper

Focused ion beam direct micromachining of DOEs
Author(s): Chantal Khan Malek; Frank T. Hartley; Jayant Neogi
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Paper Abstract

We discuss here the capability of direct manufacture of various high- resolution diffractive optics, in particular regarding micromachining of DOEs in 3D. Preliminary demonstrations were made in 2-D using an automated FIB system operated at 30 KeV with a Gallium liquid metal ion source and equipped with a gas injection system (GIS). Gratings with a 20 nm line width and zone plates with 32 nm outer ring were milled in a reactive atmosphere (iodine) directly through 3.5 (mu) m and 800 nm of gold respectively. Plans for combining FIB and X-ray lithography to make diffractive optical elements (DOEs) for JPL are also mentioned.

Paper Details

Date Published: 1 September 2000
PDF: 6 pages
Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); doi: 10.1117/12.397932
Show Author Affiliations
Chantal Khan Malek, Univ. de Paris-Sud (France)
Frank T. Hartley, Jet Propulsion Lab. (United States)
Jayant Neogi, Norsam Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 4075:
Micro-Opto-Electro-Mechanical Systems
Richard R. A. Syms, Editor(s)

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