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Proceedings Paper

Micro-optical devices in a Japanese national project
Author(s): Kimihide Nakatsu; Naoki Mitsumoto; Kiyoshi Nemoto; Yuichi Ishikawa; Takayuki Hirano
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Paper Abstract

This paper describes some aspects of micro optical devices under the Japanese national micromachine project. The national R&D project, Industrial Science and Technology Frontier Program Micromachine Technology, was inaugurated in 1991 as a ten-year project, and aims to establish a technological paradigm of micromachine throughout the multidisciplinary R&D. The final goal of our R&D is to establish following three practical applications: 1) advanced maintenance system for power plant, 2) microfactory and 3) intraluminal diagnostic and therapeutic system. For these systems, many functions such as visual inspections, contact pressure detection, wireless energy supplying and so on are required. We have developed novel micro optical devices such as 1) visual inspection devices; micro optical scanning sensor, micro stereoscope and micro camera, 2) optical pressure detection devices, 3) micro photon energy transmission device and 4) micro laser catheter, micro laser welding device and so on. We describe some topics of the micro optical devices as an outline of developed devices.

Paper Details

Date Published: 1 September 2000
PDF: 9 pages
Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); doi: 10.1117/12.397928
Show Author Affiliations
Kimihide Nakatsu, Micromachine Ctr. (Japan)
Naoki Mitsumoto, Micromachine Ctr. (Japan)
Kiyoshi Nemoto, Micromachine Ctr. (Japan)
Yuichi Ishikawa, Mechanical Engineering Lab. (Japan)
Takayuki Hirano, Micromachine Ctr. (Japan)

Published in SPIE Proceedings Vol. 4075:
Micro-Opto-Electro-Mechanical Systems
Richard R. A. Syms, Editor(s)

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