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Proceedings Paper

Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration
Author(s): David L. Dickensheets; Phillip A. Himmer; Robert A. Friholm; B. Jeffrey Lutzenberger
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Paper Abstract

A compact confocal imaging instrument is described that makes use of a high-performance bi-axial Silicon torsion mirror, in concert with a reflective dynamic parabolic membrane mirror to provide 3D beam scanning. This beam scan engine is incorporated into a confocal imaging Raman spectrometer under development for exploration of Martian rocks and soil, designed to achieve optical resolution of 1 micrometers at (lambda) equals 850 nm, with a field of view of 300 micrometers and focus control of more than 200 micrometers . Fast x-y beam scanning is achieved with the bi-axial scanner, while the parabolic membrane provides both static and dynamic focus control for gross instrument focus as well as on-the fly field curvature correction or substrate contour tracing. In this paper we describe the MOEM elements as well as on-the-fly curvature correction or substrate contour tracing. In this paper we describe the MOEM elements as well as the overall instrument architecture. We also present initial imaging results using the torsion mirror scanner, and we describe the dynamic focus element fabrication, modeling and preliminary experimental characterization.

Paper Details

Date Published: 22 August 2000
PDF: 8 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396518
Show Author Affiliations
David L. Dickensheets, Montana State Univ. (United States)
Phillip A. Himmer, Montana State Univ. (United States)
Robert A. Friholm, Montana State Univ. (United States)
B. Jeffrey Lutzenberger, Montana State Univ. (United States)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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