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Proceedings Paper

Positioning strategies and sensor integration in tools for assembling MOEMS
Author(s): Gunther Reinhart; Dirk Jacob
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Paper Abstract

Assembly is a crucial process during the production of microsystems. Especially automated and economic assembly of flip- chip at small and medium batch sizes is not solved at the moment in industry. For flexible and economic assembly of standard and flip-chip elements a tool was developed, which makes it possible to assemble MOEMS with an accuracy of less than 8 micrometers by a standard industrial robot. This is done by integrating a fine positioning drive and sensors into the tool. Moreover, a special optics module for the assembly of flip-chip elements was developed, which can be used in different positioning devices in a manual and automatic modus.

Paper Details

Date Published: 22 August 2000
PDF: 8 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396513
Show Author Affiliations
Gunther Reinhart, Technische Univ. Munchen (Germany)
Dirk Jacob, Technische Univ. Munchen (Germany)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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