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Proceedings Paper

Micromirror arrays for wavefront correction
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Paper Abstract

For wavefront correction in adaptive optics mirror devices are required, which provide a pure phase shift capability with a fine partition over the optical cross section. For this purpose we investigated arrays of piston-type micromirrors. In order to predetermine the basic deformation characteristics and to estimate appropriate design parameters a simple analytical model was derived. We then designed and fabricated arrays of different mirror elements on top of passive address devices by means of surface-micromachining realizing pixel side lengths of 75, 100, 120 and 150 micrometers . Experimental investigations of the electromechanical behavior were done by surface profile measurements using white light interferometry, which reveals a good overall functionality of the mirror arrays. Furthermore, an analog deflection range of up to 1.2 micrometers at address voltages below 32V were obtained together with a load dependent height level accuracy of 80 to 100 nm.

Paper Details

Date Published: 22 August 2000
PDF: 10 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396506
Show Author Affiliations
Andreas Gehner, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)
Michael Wildenhain, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)
Hubert K. Lakner, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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