For wavefront correction in adaptive optics mirror devices are required, which provide a pure phase shift capability with a fine partition over the optical cross section. For this purpose we investigated arrays of piston-type micromirrors. In order to predetermine the basic deformation characteristics and to estimate appropriate design parameters a simple analytical model was derived. We then designed and fabricated arrays of different mirror elements on top of passive address devices by means of surface-micromachining realizing pixel side lengths of 75, 100, 120 and 150 micrometers . Experimental investigations of the electromechanical behavior were done by surface profile measurements using white light interferometry, which reveals a good overall functionality of the mirror arrays. Furthermore, an analog deflection range of up to 1.2 micrometers at address voltages below 32V were obtained together with a load dependent height level accuracy of 80 to 100 nm.

Date Published: 22 August 2000
PDF: 10 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396506

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)