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Proceedings Paper

Electromechanical simulation of a large-aperture MOEMS Fabry-Perot tunable filter
Author(s): Jonathan L. Kuhn; Richard B. Barclay; Matthew A. Greenhouse; David Brent Mott; Shobita Satyapal
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Paper Abstract

We are developing as micro-machined electrostatically actuated Fabry-Perot tunable filter with a large clear aperture for application in high through-put wide-field imaging spectroscopy and lidar systems. In the first phase of this effort, we are developing key components based on coupled electro-mechanical simulations. In particular, the movable etalon plate design leverages high coating stress to yield a flat surface in drum- head tension over a large diameter. In this approach, the cylindrical silicon movable plate is back etched, resulting in an optically coated membrane that is suspended from a thick silicon support ring. Underestimating the interaction between the support ring, suspended membrane, and coating is critical to developing surfaces that are flat to within stringent etalon requirements. In this work, we present the simulations used to develop the movable plate, spring suspension system, and electrostatic actuation mechanism. We also present results form test of fabricated proof of concept components.

Paper Details

Date Published: 22 August 2000
PDF: 11 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396504
Show Author Affiliations
Jonathan L. Kuhn, NASA Goddard Space Flight Ctr. (United States)
Richard B. Barclay, NASA Goddard Space Flight Ctr. (United States)
Matthew A. Greenhouse, NASA Goddard Space Flight Ctr. (United States)
David Brent Mott, NASA Goddard Space Flight Ctr. (United States)
Shobita Satyapal, NASA Goddard Space Flight Ctr. (United States)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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