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Proceedings Paper

Lucent Microstar micromirror array technology for large optical crossconnects
Author(s): Vladimir A. Aksyuk; Flavio Pardo; Cristian A. Bolle; Susanne Arney; C. Randy Giles; David J. Bishop
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Paper Abstract

Electrostatically actuated, 500micrometers diameter, Si surface micromachined 2-axis tilting micromirrors were designed and fabricated in a 2 structural + 1 interconnect layer polysilicon process. The mirrors are capable of large, continuous, controlled, DC tilt in any direction at moderate actuation voltages. The lowest-mode resonance frequency is sufficiently high to decouple from the ambient vibration noise and allow setting times of less than a few milliseconds. The Au- coated reflectors, suspended in gimbal mounts via torsional springs and bearings, are tilted by applying voltage to four electrically independent sets of fixed electrodes on the substrate. The electrodes and the springs are designed to optimize actuation voltages, resonance frequencies and the deflection range. To achieve the range, the mounts are lifted and fixed fifty microns above the substrate surface during the release process by a self-assembly mechanism powered by tailored residual stress in a separate metalization layer. Square arrays with 1 mm pitch containing independently addressable identical 16, 64 and 256 mirrors were fabricated and hermetically packaged. Based on these devices, fully functional, bitrate and wavelength independent, single stage, low insertion loss, single mode fiber optical crossconnect system are built.

Paper Details

Date Published: 22 August 2000
PDF: 5 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396503
Show Author Affiliations
Vladimir A. Aksyuk, Lucent Technologies/Bell Labs. (United States)
Flavio Pardo, Lucent Technologies/Bell Labs. (United States)
Cristian A. Bolle, Lucent Technologies/Bell Labs. (United States)
Susanne Arney, Lucent Technologies/Bell Labs. (United States)
C. Randy Giles, Lucent Technologies/Bell Labs. (United States)
David J. Bishop, Lucent Technologies/Bell Labs. (United States)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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