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Proceedings Paper

Surface-micromachined mirrors for scalable fiber optic switching applications
Author(s): Uma Krishnamoorthy; Paul M. Hagelin; Jonathan Paul Heritage; Olav Solgaard
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Paper Abstract

We present design, analysis and characterization of surface- micromachined mirrors developed for fiber-optical cross-connects (OXCs). These mirrors are controlled by electrostatic microactuators, and are optimized for our beam-steering OXC switch architecture. Their geometry leads to high-density switch matrices, and the absence of frictional hinges in their actuation mechanism allows highly repeatable operation. This mirror structure features an adjustable maximum deflection angle that can be set during initial assembly or dynamically varied by integration with a standard surface-micromachined linear actuator. A commercial three-layer polysilicon surface- micromachining process is used for fabrication of the micromirrors.

Paper Details

Date Published: 22 August 2000
PDF: 8 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000);
Show Author Affiliations
Uma Krishnamoorthy, Univ. of California/Davis (United States)
Paul M. Hagelin, C-speed Corp. (United States)
Jonathan Paul Heritage, Univ. of California/Davis (United States)
Olav Solgaard, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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