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Proceedings Paper

Repair of stiction-failed surface-micromachined polycrystalline silicon cantilevers using pulsed lasers
Author(s): Leslie M. Phinney; James W. Rogers
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Paper Abstract

A technique for repairing stiction-failed, surface- micromachined polycrystalline silicon cantilevers using pulsed lasers has been developed and demonstrated. Microcantilevers, which adhered to the substrate during the chemical sacrificial layer etch and drying processes, were irradiated with either a 800 nm Ti:sapphire or a 1064 nm Nd:YAG laser and successfully freed from the substrate. The feasibility of the laser process was first shown with a Ti:sapphire laser system irradiating undoped, polycrystalline silicon microcantilevers. The repair yields for the Nd:YAG laser process were up to 100 percent for 10 micrometers wide beams as long as 1 mm for laser fluences of 70 mJ/cm2. The sample age and initial release quality affect the laser process yield, with newer samples and those with high quality initial releases having the highest number of microcantilevers being repaired.

Paper Details

Date Published: 25 August 2000
PDF: 9 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396443
Show Author Affiliations
Leslie M. Phinney, Univ. of Illinois/Urbana-Champaign (United States)
James W. Rogers, Univ. of Illinois/Urbana-Champaign (United States)

Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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