Proceedings Paper
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Paper Details
Date Published: 25 August 2000
PDF: 4 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396433
Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)
PDF: 4 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396433
Show Author Affiliations
David J. Bishop, Lucent Technologies/Bell Labs. (United States)
Vladimir A. Aksyuk, Lucent Technologies/Bell Labs. (United States)
Cristian A. Bolle, Lucent Technologies/Bell Labs. (United States)
Vladimir A. Aksyuk, Lucent Technologies/Bell Labs. (United States)
Cristian A. Bolle, Lucent Technologies/Bell Labs. (United States)
C. Randy Giles, Lucent Technologies/Bell Labs. (United States)
Flavio Pardo, Lucent Technologies/Bell Labs. (United States)
Jim A. Walker, Lucent Technologies/Bell Labs. (United States)
Flavio Pardo, Lucent Technologies/Bell Labs. (United States)
Jim A. Walker, Lucent Technologies/Bell Labs. (United States)
Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)
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