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Proceedings Paper

Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol
Author(s): Won-Ick Jang; Chang-Auck Choi; Myung-Lae Lee; Chi-Hoon Jun; Youn Tae Kim
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Paper Abstract

In silicon surface micromachining, the HF GPE process was verified as a very effective method for the dry release of microstructures. The developed GPE system with anhydrous HF gas and 2-propanol vapor was characterized and its selective etching properties were discussed. The polysilicon membrane was used as a structural layer and LTO and PECVD oxide as a sacrificial layer. We successfully fabricated the surface micromachined microstructures of a thermally driven micropump with no virtually process-induced stiction and no residues after the GPE of sacrificial oxides on polysilicon substrates.

Paper Details

Date Published: 25 August 2000
PDF: 7 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396426
Show Author Affiliations
Won-Ick Jang, Electronics and Telecommunications Research Institute (South Korea)
Chang-Auck Choi, Electronics and Telecommunications Research Institute (South Korea)
Myung-Lae Lee, Electronics and Telecommunications Research Institute (South Korea)
Chi-Hoon Jun, Electronics and Telecommunications Research Institute (South Korea)
Youn Tae Kim, Electronics and Telecommunications Research Institute (South Korea)


Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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