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Proceedings Paper

Electromechanical characterization of screen-printed PZT thick films
Author(s): Vincent Walter; Patrice Le Moal; Patrick Delobelle; Eric Joseph
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Paper Abstract

Thick soft and hard-PZT films have been fabricated on different geometries of Alumina substrates using a screen-printing technique. Three mechanical characterization tests were set up to determine Young's modulus of the films: dynamic, quasi-static and nanoindentation tests. A Young's modulus around 52+/- 7 Gpa was calculated. The piezoelectric coefficient d31 was also investigated and is found to be close to -33pC/N. The fabricated films showed also good performances when used in damping control.

Paper Details

Date Published: 24 August 2000
PDF: 8 pages
Proc. SPIE 4073, Fifth European Conference on Smart Structures and Materials, (24 August 2000); doi: 10.1117/12.396390
Show Author Affiliations
Vincent Walter, Univ. de Franche-Comte (France)
Patrice Le Moal, Univ. de Franche-Comte (France)
Patrick Delobelle, Univ. de Franche-Comte (France)
Eric Joseph, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 4073:
Fifth European Conference on Smart Structures and Materials
Pierre Francois Gobin; Clifford M. Friend, Editor(s)

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