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Proceedings Paper

Micro-optical elements fabricated with single step
Author(s): Lin Pang; Deer Yi; Yingbai Yan; Guofan Jin; Minxian Wu
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Paper Abstract

Tetraethoxyorthosilicate and methacryloxypropyl trimethoxy silane are used to form inorganic and organic networks, respectively. Photosensitive agent is added to initiate free-radical cross-linking polymerization of unsaturated carbon bonds and thus makes the material act as a negative tone photoresist. The sensitivity of the composite material is investigated with the help of real-time diffraction for different exposure time and concentration of photoinitiator. Vibrational spectroscopy is used to provide insight into the structure changes that occur when films are exposed with UV light. Developed in dilute base solution, microoptical element, such as lenses and gratings, were fabricated by contract copy with UV-exposure. Shrinkage effect is investigated after optical elements obtained.

Paper Details

Date Published: 18 August 2000
PDF: 6 pages
Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); doi: 10.1117/12.395693
Show Author Affiliations
Lin Pang, Tsinghua Univ. (China)
Deer Yi, Tsinghua Univ. (China)
Yingbai Yan, Tsinghua Univ. (China)
Guofan Jin, Tsinghua Univ. (China)
Minxian Wu, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4179:
Micromachining Technology for Micro-Optics
Sing H. Lee; Eric G. Johnson, Editor(s)

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