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Proceedings Paper

Fabrication of refractive microlens array by etching ammonium dichromate gelatin (ADG) with enzyme
Author(s): Jun Yao; Fuhua Gao; Feng Gao; Yixiao Zhang; Jingqin Su; Yongkang Guo; Zheng Cui
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Paper Abstract

A new method has been developed to fabricate refractive microlens by etching ammonium dichromate gelatin (ADG) with enzyme solution. Unlike previous methods which are used to fabricate refractive microlens with photoresist, the process of fabricating microlens by etching ADG with enzyme solution doesn't require the use of expensive equipment, and it isn't sophisticated and time consuming. The light exposes ADG through a high contrast binary mask, then the exposed parts of ADS generate cross- linking reaction. Usually, the relief achieved by water developing is very shallow (<1um) when nonpre-harden gelatin is used, so we compound a certain concentration enzyme solution, and because of surface tension, ADG turns to spherical structure after developing. The optimum technique parameters of this process are presented. Results are presented for experiments and evaluated by profile meter and interference microscope.

Paper Details

Date Published: 18 August 2000
PDF: 5 pages
Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); doi: 10.1117/12.395682
Show Author Affiliations
Jun Yao, Sichuan Univ. (United Kingdom)
Fuhua Gao, Sichuan Univ. (China)
Feng Gao, Sichuan Univ. (China)
Yixiao Zhang, Sichuan Univ. (China)
Jingqin Su, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Zheng Cui, Rutherford Appleton Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 4179:
Micromachining Technology for Micro-Optics
Sing H. Lee; Eric G. Johnson, Editor(s)

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