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Proceedings Paper

High frequency of micromechanical resonator via structural modification
Author(s): Yee Chong Loke; Q. Zou; Kim Miao Liew; Ai Qun Liu
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Paper Abstract

In this paper, it presents an improvement over a simple free-free resonator via structural modification. Two modified designs have been considered and named as an Inverse-Pi and Inverse-T free-free beam micromechanical resonator, utilizing torsional-mode support springs. The operating range, according to the simulation is 90-130 MHz. This is a great improvement over its predecessor2 whose operating frequency is 30-90 MHz. Three main design aspect of this resonator are the modified structural design, the support beam structure and the operation parameter. In the former, the relationship between the natural frequency and resonator beam thickness, width and length are found to be interrelated. For the supporting structure design, the length of the supporting beam is determined by (lambda) /4 based on torsional vibration studies. Finally, in the operation parameter, the pull down electrostatic force voltage of the transducer is determined. The experimental testing was done on an inverse-T structure and found that it conforms with the simulation results.

Paper Details

Date Published: 15 August 2000
PDF: 10 pages
Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); doi: 10.1117/12.395633
Show Author Affiliations
Yee Chong Loke, Nanyang Technological Univ. (Singapore)
Q. Zou, Nanyang Technological Univ. (Singapore)
Kim Miao Liew, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4176:
Micromachined Devices and Components VI
Eric Peeters; Oliver Paul, Editor(s)

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