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Proceedings Paper

Spiral wound transducer
Author(s): Paul C. Elliott; Stephen M. Bobbio; Michael A. Pennington; Stephen W. Smith; Jason M. Zara; John A. Hudak; Jennifer Pagan; Buchanan J. Rouse
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Paper Abstract

The Spiral Wound Transducer (SWT) is a muscle-like actuator comprising an array of deformable capacitors. The SWT is fabricated as a flat multilayer metallized plastic structure on a silicon wafer. Conventional microelectronic manufacturing techniques are used and will be described. The novel aspect of fabrication occurs after the flat SWT structures (tapes) are lifted off the wafer. In order to form a volumetric three- dimensional actuator the tapes are wound up upon themselves and bounded using a laminating process. This work as well as a characterization of the performance of the SWTs will be presented.

Paper Details

Date Published: 15 August 2000
PDF: 10 pages
Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); doi: 10.1117/12.395621
Show Author Affiliations
Paul C. Elliott, Univ. of North Carolina/Charlotte (United States)
Stephen M. Bobbio, Univ. of North Carolina/Charlotte (United States)
Michael A. Pennington, Integrated Electronic Innovations Inc. (United States)
Stephen W. Smith, Duke Univ. (United States)
Jason M. Zara, Duke Univ. (United States)
John A. Hudak, Univ. of North Carolina/Charlotte (United States)
Jennifer Pagan, Univ. of North Carolina/Charlotte (United States)
Buchanan J. Rouse, Univ. of North Carolina/Charlotte (United States)

Published in SPIE Proceedings Vol. 4176:
Micromachined Devices and Components VI
Eric Peeters; Oliver Paul, Editor(s)

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