Share Email Print

Proceedings Paper

AirJet paper mover: an example of mesoscale MEMS
Author(s): David K. Biegelsen; Andrew A. Berlin; Patrick Cheung; Markus P.J. Fromherz; David Goldberg; Warren B. Jackson; Bryan Preas; James Reich; Lars E. Swartz
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The motion of human scale objects requires MEMS-like device arrays capable of providing reasonable forces ($GTR mN) over human scale distances (10-100 cm). In principle batch fabricated values controlling air jets can satisfy these actuation requirements. By extending printed circuit board technology to include electromechanical actuation, analogous to the extension of VLSI to MEMS, the requirement of low system cost can be achieved through batch fabrication and integration of the transduction elements with computational and communication elements. In this paper we show that modulated air jets arrayed with position sensors can support and accelerate flexible media without physical contact. Precise motion control with three degrees of freedom parallel to the array, using high flow, low pressure air jet arrays is enabled using electrostatic valves having opening and closing times of approximately equals 1 ms. We present results of an exemplary platform based on printed circuit board technologies, having an array of 576 electrostatic flap valvves (1152 for double-sided actuation) and associated oriented jets, and an integrated array of 32,000 optical sensors for high resolution detection of paper edge positions. Under closed loop control edge positioning has a standard deviation of approximately equals 25 microns. Fabrication and control of the system is described.

Paper Details

Date Published: 15 August 2000
PDF: 8 pages
Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); doi: 10.1117/12.395620
Show Author Affiliations
David K. Biegelsen, Xerox Palo Alto Research Ctr. (United States)
Andrew A. Berlin, Xerox Palo Alto Research Ctr. (United States)
Patrick Cheung, Xerox Palo Alto Research Ctr. (United States)
Markus P.J. Fromherz, Xerox Palo Alto Research Ctr. (United States)
David Goldberg, Xerox Palo Alto Research Ctr. (United States)
Warren B. Jackson, Xerox Palo Alto Research Ctr. (United States)
Bryan Preas, Xerox Palo Alto Research Ctr. (United States)
James Reich, Xerox Palo Alto Research Ctr. (United States)
Lars E. Swartz, Xerox Palo Alto Research Ctr. (United States)

Published in SPIE Proceedings Vol. 4176:
Micromachined Devices and Components VI
Eric Peeters; Oliver Paul, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?