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Proceedings Paper

Peel-off probe: a cost-effective probe for electrical atomic force microscopy
Author(s): Thomas Hantschel; Stefan Slesazeck; N. Duhayon; Mingwei Xu; Wilfried Vandervorst
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Paper Abstract

Full metal probes have proven their suitability for electrical atomic force microscopy (AFM) in the last few years. Such probes could be fabricated cheaper if one reduces the number of steps and processing time. Therefore we have developed a procedure which allows to manufacture full metal probes with only two lithography steps. The etching of thin membranes is dropped which reduces the processing time by 25% compared to our previous procedure. It requires only topside processing. The probes can be peeled off from the wafer due to a special metallization procedure. This paper discusses the process scheme and presents measurements on semiconductor devices.

Paper Details

Date Published: 11 August 2000
PDF: 10 pages
Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); doi: 10.1117/12.395612
Show Author Affiliations
Thomas Hantschel, IMEC (Belgium) and Katholieke Univ. Leuven (United States)
Stefan Slesazeck, IMEC (Belgium)
N. Duhayon, IMEC (Belgium)
Mingwei Xu, IMEC (Belgium)
Wilfried Vandervorst, IMEC (Belgium) and Katholieke Unv. Leuven (Belgium)

Published in SPIE Proceedings Vol. 4175:
Materials and Device Characterization in Micromachining III
Yuli Vladimirsky; Philip J. Coane, Editor(s)

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