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Proceedings Paper

Micromachined capacitive switches at microwave frequencies
Author(s): Chee How Wong; M. J. Tan; Li Hui Guo; J.-M. Huang; Kim Miao Liew; Ai Qun Liu
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Paper Abstract

Both electrical and mechanical models, exemplified with a micromachined capacitive switch with simple bridge structure, accurately describing its electrical and mechanical characteristics are described in this paper. The electrical model is represented as a RLC circuit, while the mechanical model is represented as a fixed-fixed beam. The advantage of these models is that it is possible to pre-determine various characteristics, such as the switching time of micromachined capacitive switches, during the design stage. These models can be used to accurately design micromachined capacitive switches for microwave applications. An illustrated fabrication process is also discussed.

Paper Details

Date Published: 11 August 2000
PDF: 9 pages
Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); doi: 10.1117/12.395601
Show Author Affiliations
Chee How Wong, Nanyang Technological Univ. (Singapore)
M. J. Tan, Nanyang Technological Univ. (Singapore)
Li Hui Guo, Nanyang Technological Univ. (Singapore)
J.-M. Huang, Nanyang Technological Univ. (Singapore)
Kim Miao Liew, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4175:
Materials and Device Characterization in Micromachining III
Yuli Vladimirsky; Philip J. Coane, Editor(s)

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