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Proceedings Paper

Chemical vapor detection using microfabricated flexural plate silicon resonator arrays
Author(s): Brian T. Cunningham; Richard A. Kant; Chris Daly; Marc S. Weinberg; Jane Wu Pepper; Christopher Clapp; Rob Bousquet; Brenda Hugh
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Paper Abstract

This presentation will describe the design, fabrication, and testing of 2-element, and 8-element micro-Chemical Analysis Array ((mu) CANARY) sensor chips and address electronics. The detailed performance characterization of (mu) CANARY sensors for vapor and liquid phase detection will be presented. For vapor detection, NRL has applied polymer receptor coatings targeted at detection of chemical weapon agents, and has performed extensive chemical vapor exposure tests using two chemical weapon simulants and four vapor phase interferents. Data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity will be presented.

Paper Details

Date Published: 28 July 2000
PDF: 12 pages
Proc. SPIE 4036, Chemical and Biological Sensing, (28 July 2000); doi: 10.1117/12.394060
Show Author Affiliations
Brian T. Cunningham, Draper Lab. (United States)
Richard A. Kant, Naval Research Lab. (United States)
Chris Daly, Naval Research Lab. (United States)
Marc S. Weinberg, Draper Lab. (United States)
Jane Wu Pepper, Draper Lab. (United States)
Christopher Clapp, Draper Lab. (United States)
Rob Bousquet, Draper Lab. (United States)
Brenda Hugh, Draper Lab. (United States)

Published in SPIE Proceedings Vol. 4036:
Chemical and Biological Sensing
Patrick J. Gardner, Editor(s)

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