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Proceedings Paper

Shrinkage of spacing in fabricating sol-gel optical elements
Author(s): Lin Pang; Deer Yi; Yingbai Yan; Guofan Jin; Minxian Wu
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Paper Abstract

Real-time effect was investigated with the binary masks and contact copy method in the processing of sol-gel hybrid material. The height of the real time relief increases slowly with the increase of exposure dose, but is no relation with the variation of the spatial frequency of the mask. Moreover, the height of the real-time relief is dependent on the thickness of the film deposited on the substrate. Compared with the mask, the spacing of the exposed areas in sol-gel film shrinks, and the shrinkage rate is about 10-20%. The possible reason causing the real- time effect is discussed.

Paper Details

Date Published: 11 July 2000
PDF: 6 pages
Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); doi: 10.1117/12.392164
Show Author Affiliations
Lin Pang, Tsinghua Univ. (China)
Deer Yi, Tsinghua Univ. (China)
Yingbai Yan, Tsinghua Univ. (China)
Guofan Jin, Tsinghua Univ. (China)
Minxian Wu, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4078:
Optoelectronic Materials and Devices II
Yan-Kuin Su; Pallab Bhattacharya, Editor(s)

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