Share Email Print
cover

Proceedings Paper

Geometric correction of SEM images
Author(s): Jay P. Kapur; David P. Casasent
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Abstract not available.

Paper Details

Date Published: 17 July 2000
PDF: 12 pages
Proc. SPIE 4044, Hybrid Image and Signal Processing VII, (17 July 2000); doi: 10.1117/12.391928
Show Author Affiliations
Jay P. Kapur, Carnegie Mellon Univ. (United States)
David P. Casasent, Carnegie Mellon Univ. (United States)


Published in SPIE Proceedings Vol. 4044:
Hybrid Image and Signal Processing VII
David P. Casasent; Andrew G. Tescher, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray