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Proceedings Paper

Morphology and mechanical properties of oblique angle columnar thin films
Author(s): Robert A. Knepper; Russell F. Messier
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Paper Abstract

The anisotrophy of the morphology in oblique incidence, evaporated, columnar films has been studied previously only qualitatively, primarily by scanning electron microscopy. However, using atomic force microscopy and power spectral density analysis, new approaches are developed to quantify these anisotrophies in morphology in terms of their distribution functions of size, shape, spacing, and height. In addition, the biaxial stress of oblique angle columnar thin films prepared with varying angle of vapor incidence was measured by using a laser scanning method to determine changes in curvature. From this data, approaches to a quantitative model are proposed to describe the changes in morphology with varying angles of vapor incidence as related to ballistic aggregation and self-shadowing processes.

Paper Details

Date Published: 30 June 2000
PDF: 8 pages
Proc. SPIE 4097, Complex Mediums, (30 June 2000); doi: 10.1117/12.390588
Show Author Affiliations
Robert A. Knepper, The Pennsylvania State Univ. (United States)
Russell F. Messier, The Pennsylvania State Univ. (United States)

Published in SPIE Proceedings Vol. 4097:
Complex Mediums
Akhlesh Lakhtakia; Werner S. Weiglhofer; Russell F. Messier, Editor(s)

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