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Proceedings Paper

50-mm MEMS deformable mirror
Author(s): Sigmund Manhart; Werner J. Hupfer; Susanne Nikolov; Christian Wuehrer; Gleb V. Vdovin; Zoran Sodnik
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Paper Abstract

A 50 mm diameter micromachined membrane mirror was designed and manufactured at TU Delft/DIMES in the framework of ESA's technology research program on adaptive optics. Equipped with 39 actuator electrodes the membrane mirror can be electrostatically deformed and used as a wavefront corrector. Functional and performance tests were carried out at Dornier Satellitensysteme GmbH to show its suitability for quasi- static correction of low-order aberrations caused by thermal and gravitational stresses in the future generation of large space telescopes.

Paper Details

Date Published: 7 July 2000
PDF: 8 pages
Proc. SPIE 4007, Adaptive Optical Systems Technology, (7 July 2000); doi: 10.1117/12.390294
Show Author Affiliations
Sigmund Manhart, Dornier Satellitensysteme GmbH (Germany)
Werner J. Hupfer, Dornier Satellitensysteme GmbH (Germany)
Susanne Nikolov, Dornier Satellitensysteme GmbH (Germany)
Christian Wuehrer, Dornier Satellitensysteme GmbH (Germany)
Gleb V. Vdovin, Delft Univ. of Technology (Netherlands)
Zoran Sodnik, European Space Research and Technology Ctr. (Netherlands)

Published in SPIE Proceedings Vol. 4007:
Adaptive Optical Systems Technology
Peter L. Wizinowich, Editor(s)

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