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Proceedings Paper

Patterning of highly conducting polyaniline films
Author(s): Teresita O. Graham; Ali Afzali-Kushaa; Marie Angelopoulos; Jeffrey D. Gelorme; Jane M. Shaw
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Paper Abstract

Polyaniline is a family of soluble, electrically conducting polymers that have a potential for a number of applications. They are a unique class of electronic materials which combines the electronic properties of metals with the mechanical and physical properties, and the processing advantages of a conventional organic polymer. In this paper, we will discuss the synthesis, and formulation of a highly conductive polyaniline that has applications as electrodes or thin film wiring. However, for these and other uses it is necessary to pattern the conducting polymer lithographically. We will discuss the various ways of patterning polyaniline, either indirectly or using the conventional photoresist technology. The effects of each patterning procedure on the conductivity of the polyaniline will also be covered.

Paper Details

Date Published: 21 July 2000
PDF: 10 pages
Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); doi: 10.1117/12.390069
Show Author Affiliations
Teresita O. Graham, IBM Thomas J. Watson Research Ctr. (United States)
Ali Afzali-Kushaa, IBM Thomas J. Watson Research Ctr. (Iran)
Marie Angelopoulos, IBM Thomas J. Watson Research Ctr. (United States)
Jeffrey D. Gelorme, IBM Thomas J. Watson Research Ctr. (United States)
Jane M. Shaw, IBM Thomas J. Watson Research Ctr. (United States)

Published in SPIE Proceedings Vol. 3997:
Emerging Lithographic Technologies IV
Elizabeth A. Dobisz, Editor(s)

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