The paper proposed a high resolution single-chip monolithic inkjet printhead by combination glowing of nozzle plate on the silicon substrate and anisotropic etching. Ink channels are defined by a sacrificed layer and etched through a mesh network by anisotropic etching. Silicon based channels are strong enough to against the attack of ink solution. Surface planarization is achieved by using PECVD deposited low stress dielectric film on top of the channels to seal mesh cavities. The heater elements are buried in a thin- sandwiched membrane and face down like a back shooter. Ink slot is formed by etching the substrate from the backside and channel is then connected with ink slot. Electrical forming nozzle plate will be done later. In this structure, no more another ink channel material is necessary since it is formed on Si substrate. By direct forming nozzle plate on chip, alignment for bonding nozzle plate and chip could be avoided to cost down.

Date Published: 28 June 2000
PDF: 7 pages
Proc. SPIE 4080, Input/Output and Imaging Technolgies II, (28 June 2000);

Published in SPIE Proceedings Vol. 4080:
Input/Output and Imaging Technolgies II
Yung-Sheng Liu; Thomas S. Huang, Editor(s)