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Proceedings Paper

Photosensitive sol-gel waveguides on silicon substrates as MOEM devices
Author(s): Ananth Selvarajan; A. Anil Kumar; D. Prem Anil kumar; Gopalkrishna M. Hegde; Talabuttala Srinivas
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Paper Abstract

Integrated optical components formed by sol-gel process and MEMS devices created on silicon substrate can be used to realize different types of sensing elements for smart structure applications. In this paper we report the fabrication of Ce, Ge and (Ce + Er) doped sol-gel based waveguides on silicon substrates and their optical characterization in terms of light amplification and photosensitivity. We also report results of fabrication and characterization of Bragg gratings in sol-gel based waveguides. The number of layers required for waveguidance and single mode operation has been calculated using the dispersion equations for asymmetric planar waveguides.

Paper Details

Date Published: 21 June 2000
PDF: 8 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388922
Show Author Affiliations
Ananth Selvarajan, Indian Institute of Science/Bangalore (India)
A. Anil Kumar, Indian Institute of Science/Bangalore (India)
D. Prem Anil kumar, Indian Institute of Science/Banglaore (India)
Gopalkrishna M. Hegde, Ngee Ann Polytechnic (Singapore)
Talabuttala Srinivas, Indian Institute of Science/Bangalore (India)

Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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