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Proceedings Paper

Micromachined convective accelerometer and inclinometer
Author(s): Lijie Li; Yongjun Yang; Tong Zhao; Yanjun Zhao; Chun-Guang Liang
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Paper Abstract

The reports relates to a fluid based accelerometer and inclinometer and more particularly to a transducer which determines acceleration, inclination, position or velocity based on a temperature differential caused by the effect of acceleration on free or natural convection. This device includes a heater a d two temperature sensing elements mounted within a sealed enclosure containing a gas. The thermal sensors and temperature sensors were produced using a commercial CMOS process accelerometer based on above principle has been fabricated and tested.

Paper Details

Date Published: 21 June 2000
PDF: 5 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388912
Show Author Affiliations
Lijie Li, Hebei Semiconductor Research Institute (United Kingdom)
Yongjun Yang, Hebei Semiconductor Research Institute (China)
Tong Zhao, Hebei Semiconductor Research Institute (China)
Yanjun Zhao, Hebei Semiconductor Research Institute (China)
Chun-Guang Liang, Hebei Semiconductor Research Institute (China)

Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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