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Proceedings Paper

Phase synchronization of micromirror arrays using elastic linkages
Author(s): Peizen Chang; Chih-Wen Liu; Shyh-yung Pao; Jenn-Yi Chen
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Paper Abstract

This work analyzes to synchronize the phases of micromirror array and operate resonance frequency. The eigenvector, which synchronizes in-phase, can be found via a mass- damping-spring system. The device replaces conventional large area mirror, thus enhancing the working frequency and allowing micromirror arrays to reduce a smaller gap. The torsional micromirror array fabricates using three conventional masks based on bulk-micromachining technology. This work also describes the proposed design in detail. According to our result, the difference between the testing results and theoretical value is within 1 degree.

Paper Details

Date Published: 21 June 2000
PDF: 9 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388910
Show Author Affiliations
Peizen Chang, National Taiwan Univ. (Taiwan)
Chih-Wen Liu, National Taiwan Univ. (Taiwan)
Shyh-yung Pao, National Taiwan Univ. (Taiwan)
Jenn-Yi Chen, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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