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Proceedings Paper

Fabrication of a microelectromagnetic flow sensor for microflow rate measurement
Author(s): HyeunJoong Yoon; SoonYoung Kim; SangWoo Lee; Sang Sik Yang
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Paper Abstract

This paper presents the fabrication of a micro electromagnetic flow sensor for the liquid flow rate measurement. The micro electromagnetic flow sensor has some advantages such as a simple structure, no heat generation, a rapid response and no pressure loss. The principle of the micro electromagnetic flow sensor is based on Faraday's law. If conductive fluid passes through a magnetic field, the electromotive force is generated and detected by two electrodes on the wall of the flow channel. The flow sensor consists of two permanent magnets and a silicon flow channel with two electrodes. The dimension of the flow sensor is 9 mm by 9 mm by 1 mm. The micro flow channel is mainly fabricated by anisotropic etching of two silicon wafers, and the detection electrodes are fabricated by metal evaporation process. The characteristic of the fabricated flow sensor is obtained experimentally. When the flow rates of water with the conductance of 100-200 (mu) S/cm are 9.1 ml/min and 62 ml/min, the generated electromotive forces are 261 (mu) V and 7.3 mV, respectively.

Paper Details

Date Published: 21 June 2000
PDF: 8 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388903
Show Author Affiliations
HyeunJoong Yoon, Ajou Univ. (South Korea)
SoonYoung Kim, Ajou Univ. (South Korea)
SangWoo Lee, Ajou Univ. (South Korea)
Sang Sik Yang, Ajou Univ. (South Korea)

Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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