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Proceedings Paper

Excimer laser micromachining for fabrication of diamond diffractive optical elements
Author(s): Vitali I. Konov; V. V. Kononenko; Sergej M. Pimenov; Alexander M. Prokhorov; Vladimir S. Pavelyev; Victor A. Soifer; Peter F. Muys; E. Vandamme
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Paper Abstract

Results of the development of multilevel diamond diffractive optical elements for high power CO2 lasers are reported. For this purpose, the technique of selected-area laser ablation was applied to create a given phase microrelief on mechanically polished CVD polycrystalline diamond plates. High precision micromachining of the diamond plates was performed using a KrF excimer-laser-based system. The spherical and cylindrical Fresnel lenses with an aperture up to 6 by 6 mm6 were produced and tested with a cw CO2 laser. The diffraction efficiency of the developed DOE measured in the case of the cylindrical lens was found to be only 1-2 percent lower than the theoretical value. Also a diffractive shaper transforming a Gaussian beam of a CO2 laser into a uniformly filled-in rectangle was designed and fabricated.

Paper Details

Date Published: 7 June 2000
PDF: 10 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387570
Show Author Affiliations
Vitali I. Konov, General Physics Institute (Russia)
V. V. Kononenko, General Physics Institute (Russia)
Sergej M. Pimenov, General Physics Institute (Russia)
Alexander M. Prokhorov, General Physics Institute (Russia)
Vladimir S. Pavelyev, Image Processing Systems Institute (Russia)
Victor A. Soifer, Image Processing Systems Institute (Russia)
Peter F. Muys, Laser Power Europe N.V. (Belgium)
E. Vandamme, Laser Power Europe N.V. (Belgium)

Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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