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Proceedings Paper

Two-axis-scattering laser Doppler vibrometer for microstructures
Author(s): Bryan Kok Ann Ngoi; Krishnan Venkatakrishnan; Beng Heok Tan; N. Noel; Zuowei Shen; C. S. Chin
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Paper Abstract

In this paper, a two-axis-scanning Laser Doppler Vibrometer for micro-scale object dynamic behavior characterization is described. The system employs a two-axis acousto-optic deflectors and a telecentric lens to achieve high-precision and high-speed scanning. The newly developed vibrometer was used to measure the dynamic behavior of an entire AFM cantilever operated in free air. The 120 micrometers long, 25 micrometers wide micro-cantilever dynamic response was measured at different positions with 2 micrometers spatial resolution.

Paper Details

Date Published: 22 May 2000
PDF: 8 pages
Proc. SPIE 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2000); doi: 10.1117/12.386754
Show Author Affiliations
Bryan Kok Ann Ngoi, Nanyang Technological Univ. (Singapore)
Krishnan Venkatakrishnan, Nanyang Technological Univ. (Singapore)
Beng Heok Tan, Nanyang Technological Univ. (Singapore)
N. Noel, Nanyang Technological Univ. (Singapore)
Zuowei Shen, Nanyang Technological Univ. (Singapore)
C. S. Chin, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4072:
Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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