Proceedings Paper
Laser-diode-based pseudo-heterodyne interferometer for online process control of wire bonders| Format | Member Price | Non-Member Price |
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Paper Abstract
As part of a government funded multidisciplinary project, a sensor has been developed to allow the measurement of the ultrasonic amplitude at the tip of the bonding too. A laser interferometer has been designed with a fiber coupled miniature measurement head which can be mounted on the rotating bond head. A modulated visible diode laser is employed to generate a direction-sensitive Doppler signal according to the pseudo-heterodyne principle.
Paper Details
Date Published: 22 May 2000
PDF: 11 pages
Proc. SPIE 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2000);
Published in SPIE Proceedings Vol. 4072:
Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)
PDF: 11 pages
Proc. SPIE 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2000);
Show Author Affiliations
Georg Siegmund, Polytec GmbH (Germany)
Published in SPIE Proceedings Vol. 4072:
Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)
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