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Proceedings Paper

Development of an optical system for measuring the roughness of blasted surfaces
Author(s): Zhicong Deng; Masanori Kurita
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Paper Abstract

An optical method for measuring surface roughness using Beckmann's theory on the scattering of electromagnetic waves is [proposed. To analyze the relation between the surface slope and the scattered light, the surface slope distribution of blasted specimens was calculated from the surface profile measured with a stylus profilometer. The light scattered from the surfaces was measured with a PCD (Plasma-Coupled Device) linear image sensor. The surface slope and surface roughness were evaluated from the measured intensity distribution. Both the distributions of the scattered light intensity and the surface slope can be approximated by a Gaussian function, suggesting that the distribution of the scattered light intensity is due to the distribution of the surface roughness slope. A computer simulation was also carried out to determine the scope of the applicability of the method.

Paper Details

Date Published: 9 May 2000
PDF: 8 pages
Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385553
Show Author Affiliations
Zhicong Deng, Nagaoka Univ. of Technology (Japan)
Masanori Kurita, Nagaoka Univ. of Technology (Japan)

Published in SPIE Proceedings Vol. 4077:
International Conference on Sensors and Control Techniques (ICSC 2000)
Desheng Jiang; Anbo Wang, Editor(s)

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