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Proceedings Paper

SEM and TEM investigation on columnar microstructure in ZnO film
Author(s): Huibin Qin; Hong Yu
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Paper Abstract

The ZnO film with 6 mm symmetry is one kind of functional films with different use. The columnar microstructure in the film has an affect on the properties of materials. In this paper, ZnO/Si film was deposited by planar magnetron sputtering. The columnar microstructure was examined with SEM and TEM. The SEM cross image of cross-section clearly showed that the ZnO film was constituted of columnar microstructure, the crystal grain grow up with C-axis perpendicular to the film surface. The orientation columnar grain structure is then formed. On the other hand, SEM image is only the morphology of the cross section and can't obtain the directly conclusion. In this paper the TEM cross- sectional examination is also carried out. The TEM examination includes transmission image and micro-area electronic diffraction analysis. The TEM image showed that the size of columnar microstructure is about 120 nm. The axis of the microstructure was parallel to the C axis of film. There was inclination, branch, meandering, and integration. The diameter of the structure was not uniform along the axis. The border area of the structure was formed by low-density materials.

Paper Details

Date Published: 9 May 2000
PDF: 5 pages
Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385537
Show Author Affiliations
Huibin Qin, Hangzhou Institute of Electronics Engineering (China)
Hong Yu, 52nd Institute of Information Industry Ministry (China)

Published in SPIE Proceedings Vol. 4077:
International Conference on Sensors and Control Techniques (ICSC 2000)
Desheng Jiang; Anbo Wang, Editor(s)

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