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Proceedings Paper

Backside-illuminated 6.6-um pixel video-rate CCDs for scientific imaging applications
Author(s): John R. Tower; Peter A. Levine; Fu-Lung Hsueh; Vipulkumar Patel; Pradyumna K. Swain; Grazyna M. Meray; James T. Andrews; Robin M. Dawson; Thomas M. Sudol; Robert Andreas
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Paper Abstract

A family of backside illuminated CCD imagers with 6.6 micrometers pixels has been developed. The imagers feature full 12 bit (> 4,000:1) dynamic range with measured noise floor of < 10 e RMS at 5 MHz clock rates, and measured full well capacity of > 50,000 e. The modulation transfer function performance is excellent, with measured MTF at Nyquist of 46% for 500 nm illumination. Three device types have been developed. The first device is a 1 K X 1 K full frame device with a single output port, which can be run as a 1 K X 512 frame transfer device. The second device is a 512 X 512 frame transfer device with a single output port. The third device is a 512 X 512 split frame transfer device with four output ports. All feature the high quantum efficiency afforded by backside illumination.

Paper Details

Date Published: 15 May 2000
PDF: 7 pages
Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000);
Show Author Affiliations
John R. Tower, Sarnoff Corp. (United States)
Peter A. Levine, Sarnoff Corp. (United States)
Fu-Lung Hsueh, Sarnoff Corp. (United States)
Vipulkumar Patel, Sarnoff Corp. (United States)
Pradyumna K. Swain, Sarnoff Corp. (United States)
Grazyna M. Meray, Sarnoff Corp. (United States)
James T. Andrews, Sarnoff Corp. (United States)
Robin M. Dawson, Sarnoff Corp. (United States)
Thomas M. Sudol, Sarnoff Corp. (United States)
Robert Andreas, Sarnoff Corp. (United States)

Published in SPIE Proceedings Vol. 3965:
Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications
Morley M. Blouke; Nitin Sampat; Thomas Yeh; Nitin Sampat; George M. Williams Jr.; Thomas Yeh, Editor(s)

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