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Proceedings Paper

Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films
Author(s): Kazuhiko Omote; T. Kikuchi; J. Harada; Masashi Kawasaki; Akira Ohtomo; M. Ohtani; Tsuyoshi Ohnishi; Daisuke Komiyama; Hideomi Koinuma
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Paper Abstract

For the rapid structural characterization of combinatorial epitaxial thin films, we developed an X-ray diffraction system. A convergent X-ray beam from a curved crystal monochromator is focused on sample surface about 0.1 mm X 10 mm in size. Diffraction patterns of this area are simultaneously observed on the 2D detector within a few degree. Thus, rocking curve profiles of combinatorial epitaxial thin films for one-column pixels can be measured rapidly with Bragg peak of substrate; the measurement time depends on the film thickness, but the most cases are within one minute.

Paper Details

Date Published: 17 May 2000
PDF: 8 pages
Proc. SPIE 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development, (17 May 2000);
Show Author Affiliations
Kazuhiko Omote, Rigaku Corp. (Japan)
T. Kikuchi, Rigaku Corp. (Japan)
J. Harada, Rigaku Corp. (Japan)
Masashi Kawasaki, Tokyo Institute of Technology (Japan)
Akira Ohtomo, Tokyo Institute of Technology (Japan)
M. Ohtani, Tokyo Institute of Technology (Japan)
Tsuyoshi Ohnishi, Tokyo Institute of Technology (Japan)
Daisuke Komiyama, Tokyo Institute of Technology (Japan)
Hideomi Koinuma, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 3941:
Combinatorial and Composition Spread Techniques in Materials and Device Development
Ghassan E. Jabbour, Editor(s)

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