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Proceedings Paper

Dynamic checking improves MEMS design methodology
Author(s): Xavi Marin; Jordi Carrabina; Joan Bausells
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Paper Abstract

Design verification methodologies and tool such as DRC and ERC used on MEMS design have been inherited from the transistor based analog and digital full custom design flows. However the devices are defined on a 2D layout, they have a 3D structure. Thus, current tools do not have into account the new features that appear in MEMS design, especially those related with device micro machining. The main consequence on it is that it is necessary to include information of the vertical parameters on the DRC, what is not at all usual in classical design. We claim that the inclusion of such information together with the consequent improvement of tools for DRC, ERC and device parameter extraction, can reduce design and simulation efforts as well as improve the manufacturing yield.

Paper Details

Date Published: 10 April 2000
PDF: 6 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382310
Show Author Affiliations
Xavi Marin, Ctr. Nacional de Microelectronica (Spain)
Jordi Carrabina, Univ. Autonoma de Barcelona (Spain)
Joan Bausells, Ctr. Nacional de Microelectronica (Spain)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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