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Proceedings Paper

New types of silicon torsion microspring and their characterization
Author(s): Werner Brenner; Gh. Haddad; H. Rennhofer; M. Rennhofer; Aleksandar Vujanic; Gordana Popovic
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Paper Abstract

A number of methods for torque measurements in the macro domain exist, but only some of them can be scaled down to micro dimensions. This paper describes one method for measuring very small moments which is based on the measurement of torque by using silicon micro springs. Three different designs of torsion micro springs have been produced. The experimentally measured results show the possibility of torque measurement in the sub-(mu) Nm range.

Paper Details

Date Published: 10 April 2000
PDF: 9 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382305
Show Author Affiliations
Werner Brenner, Technische Univ. Wien (Austria)
Gh. Haddad, Technische Univ. Wien (Austria)
H. Rennhofer, Technische Univ. Wien (Austria)
M. Rennhofer, Technische Univ. Wien (Austria)
Aleksandar Vujanic, Technische Univ. Wien (Austria)
Gordana Popovic, Technische Univ. Wien (Austria)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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