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Proceedings Paper

Rapid fabrication of microcomponents
Author(s): Thomas Hanemann; Juergen H. Hausselt; Robert Ruprecht; M. Skrifvars; K.-H. Zum Gahr; Wilhelm Pfleging
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Paper Abstract

In the macroscopic world different 'rapid'-technologies like Rapid Prototyping, Rapid Manufacturing or Rapid Tooling have been established for a fast prototype or molding tool development. In all cases CAD-data can be transformed in a model or prototype directly using a laser which polymerizes reactive resin layer by layer to a final 3D mold within a short period. In this work the rapid fabrication of micro components made from polymers or composites will be presented. The whole fabrication process is divided into two main steps: Firstly laser assisted micro machining using Nd:YAG and KrF-Excimer laser allows a rapid manufacturing of micro structured cemented carbide or steel mold inserts. Secondly the application of light induced reaction injection molding using reactive monomer/polymer resins gives access to the replication of the previously fabricated mold insert. The total processing period starting from CAD until the modeled micro structured part is less than one week.

Paper Details

Date Published: 10 April 2000
PDF: 8 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382295
Show Author Affiliations
Thomas Hanemann, Forschungszentrum Karlsruhe GmbH (Germany)
Juergen H. Hausselt, Forschungszentrum Karlsruhe GmbH (Germany)
Robert Ruprecht, Forschungszentrum Karlsruhe GmbH (Germany)
M. Skrifvars, SICOMP (Sweden)
K.-H. Zum Gahr, Forschungszentrum Karlsruhe GmbH (Germany)
Wilhelm Pfleging, Forschungszentrum Karlsruhe GmbH (Germany)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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