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Proceedings Paper

Standardization for microsystem technology
Author(s): Werner Brenner; A. Stelmach; J. Baret
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Paper Abstract

This article sets out to first recall some of the major principles of standardization and to identify the main areas of MST where standards would be beneficial. It then sets out to identify the main organizations presently involved in standardization activities.

Paper Details

Date Published: 10 April 2000
PDF: 8 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382292
Show Author Affiliations
Werner Brenner, Technische Univ. Wien (Austria)
A. Stelmach, Technische Univ. Wien (Austria)
J. Baret, INOCON GmbH (Austria)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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