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Proceedings Paper

Scanning micromechanical mirror for fine-pointing units of intersatellite optical links
Author(s): Jussi Graeffe; Mika Suhonen; Hannu Sipola; Teuvo Sillanpaa
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Paper Abstract

A light and fast 2-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic and piezoelectric actuators, which are relatively large and heavy. MEMS technology bears a high potential in space applications offering reduction of device size, mass and power consumption. Micro technology makes batch mode fabrication possible yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micro machined electrostatically actuated 2-axial mirror, which can be controlled with a microradian accuracy and a large bandwidth over the angular range of +/- 3 mrad.

Paper Details

Date Published: 10 April 2000
PDF: 7 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382277
Show Author Affiliations
Jussi Graeffe, VTT Automation (Finland)
Mika Suhonen, VTT Automation (Finland)
Hannu Sipola, VTT Automation (Finland)
Teuvo Sillanpaa, VTT Automation (Finland)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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