The LC series resonant circuit can be used to obtain large electrostatic forces at relatively low AC voltages. This makes LC derive attractive for electrostatic actuation and force feedback. It can also be used for achieving large displacements of a micro mechanical plate capacitor either by sweeping the frequency or the amplitude of the driving AC voltage. In both cases relatively good linearity can be obtained. The minimum driving voltages and maximum driving speeds are discussed. It is found that the LCR drive can tolerate relatively large parasitic capacitances. measurement done on a dual capacitive acceleration sensor verify the calculated results. A drive AC voltage rms amplitude of 10 percent of the DC pull-in voltage deflected the moving plate by about 60 percent of the nominal gap, limited only be a mechanical stopper.

Date Published: 10 April 2000
PDF: 12 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382264

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)