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Proceedings Paper

High-power excimer laser with excellent energy stability
Author(s): Kazuhiro Hirata; Kazuhiro Saida; Hiroyuki Kato
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Paper Abstract

A 200 watts excimer laser with excellent energy stability has been developed. The laser is based on the XMR model 5300, and thorough improvements were made over the XMR5300. The laser can produce a stable output of 200 watts (667 mJ, 300 Hz) under servo-controlled operation over 24 hours (greater than 25 million pulses). During this operation, the output fluctuation was found to be less than 1.5% for (sigma) and 10% for peak to peak. Horizontal and vertical beam divergences were less than 1 mrad and 4 mrad, respectively.

Paper Details

Date Published: 3 April 2000
PDF: 5 pages
Proc. SPIE 3889, Advanced High-Power Lasers, (3 April 2000); doi: 10.1117/12.380860
Show Author Affiliations
Kazuhiro Hirata, Sumitomo Heavy Industries, Ltd. (Japan)
Kazuhiro Saida, Sumitomo Heavy Industries, Ltd. (Japan)
Hiroyuki Kato, Sumitomo Heavy Industries, Ltd. (Japan)


Published in SPIE Proceedings Vol. 3889:
Advanced High-Power Lasers
Marek Osinski; Howard T. Powell; Koichi Toyoda, Editor(s)

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