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Proceedings Paper

Implementing reticle blank inspection in a production environment
Author(s): Kevin A. Krause; William B. Howard
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Paper Abstract

Photronics and KLA-Tencor are jointly examining several aspects of reticle blank inspection. PBS blank quality has been examined using the KLA-Tensor STARlight reticle inspection system. PBS blanks were inspected using a 500-nm pixel with the highest sensitivity settings. Data from the initial phases of this study show conclusively that blank defects with certain characteristics can, with high probability, `transfer' to the finished reticle. These conclusions were drawn from a systematic study of several test samples containing 452 blank defects. These defects were classified using three different characteristics and correlation studies were completed to determine which factors most significantly influence transfer rates. This study has now been expanded to include production reticles. The results are being used to develop a comprehensive blank inspection protocol in a commercial mask production facility. We report on all phases of the project including the trial program.

Paper Details

Date Published: 3 February 2000
PDF: 6 pages
Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); doi: 10.1117/12.377116
Show Author Affiliations
Kevin A. Krause, Photronics, Inc. (United States)
William B. Howard, KLA-Tencor Corp. (United States)

Published in SPIE Proceedings Vol. 3996:
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Uwe F. W. Behringer, Editor(s)

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