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Proceedings Paper

CAR blanks feasibility study results
Author(s): Yasunori Yokoya; Hideo Kobayashi; Takao Higuchi; Keishi Asakawa; Akinori Kurikawa; Tadashi Sakurai; Masahiro Hashimoto; Fumiko Ota
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Paper Abstract

Appearance of e-beam exposure tools with a high acceleration voltage has created a growing need for a chemically amplified resist (CAR) system with high sensitivity, high contrast, superior resolution and superior post-coating delay stability. While mask-makers have been procuring resist-coated photomask blanks, it is generally considered that CARs must be spin-coated just prior to exposure due to its short shelf-life after coating. However, the industry would like to continue procuring pre-CAR-coated blanks from a blanks supplier, who also intends to support mask-makers in this way. This paper describes the results of a feasibility study on mask blanks coated with CARs for advanced e-beam reticle fabrication.

Paper Details

Date Published: 3 February 2000
PDF: 6 pages
Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); doi: 10.1117/12.377099
Show Author Affiliations
Yasunori Yokoya, HOYA Corp. (Japan)
Hideo Kobayashi, HOYA Corp. (Japan)
Takao Higuchi, HOYA Corp. (Japan)
Keishi Asakawa, HOYA Corp. (Japan)
Akinori Kurikawa, HOYA Corp. (Japan)
Tadashi Sakurai, HOYA Corp. (Japan)
Masahiro Hashimoto, HOYA Corp. (Japan)
Fumiko Ota, HOYA Corp. (Japan)

Published in SPIE Proceedings Vol. 3996:
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Uwe F. W. Behringer, Editor(s)

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