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Proceedings Paper

Modeling and diagnostics of pulsed laser-solid interactions: applications to laser cleaning
Author(s): Roland Oltra; Enno Arenholz; Paul Leiderer; Wolfgang Kautek; Costas Fotakis; Michel L. Autric; Carmen N. Afonso Rodriguez; Paul Wazen
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Paper Abstract

The present study concerns the cleaning of materials using pulsed laser irradiation and it summarizes the most recent results obtained by the collaborative research of different European groups, within the framework of a European program for training and mobility of researchers. A series of pulsed lasers, which emit at various wavelengths (from UV to IR) with short duration of pulse (few nano-, pico- or femto- seconds), is used for the removal of metallic, ceramic and organic pollutants from contaminated solid surfaces of different natures. The scientific results obtained so far are focused on the laser cleaning of silicon wafers from sub-micrometer particles, the theoretical modeling of particles removal mechanism during dry laser cleaning, the removal of oxide layers from oxidized metals and alloys, as well as on the development of laser imaging as a diagnostic tool for the estimation of the efficiency of the proposed cleaning technique.

Paper Details

Date Published: 1 February 2000
PDF: 10 pages
Proc. SPIE 3885, High-Power Laser Ablation II, (1 February 2000); doi: 10.1117/12.377000
Show Author Affiliations
Roland Oltra, Univ. de Bourgogne (France)
Enno Arenholz, Johannes-Kepler-Univ. Linz (Austria)
Paul Leiderer, Univ. of Konstanz (Germany)
Wolfgang Kautek, Federal Institute for Materials Research and Testing (Germany)
Costas Fotakis, Foundation for Research and Technology-Hellas (Greece)
Michel L. Autric, Institute for Research on Non-Equilibrium Phenomena (France)
Carmen N. Afonso Rodriguez, Instituto de Optica (Spain)
Paul Wazen, Quantel (France)

Published in SPIE Proceedings Vol. 3885:
High-Power Laser Ablation II
Claude R. Phipps; Masayuki Niino, Editor(s)

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